C-V Characterization System for Semiconductor Power Devices
C-V Characterization System for Semiconductor Power Devices
C-V Characterization System for Semiconductor Power Devices
C-V Characterization System for Semiconductor Power Devices

C-V Characterization System for Semiconductor Power Devices

● Wide frequency range: frequency range 10Hz ~ 1MHz continuous frequency point adjustable

● High accuracy and large dynamic range: provide 0V~3500V bias voltage range, accuracy 0.1%

● Built-in CV test: Built-in automated CV test software, including C-V (capacitance-voltage), C-T (capacitance-time), C-F (capacitance-frequency) and other test test functions.

IV-compatible testing: Supports both breakdown and leakage current characterization.

● Real-time curve plotting: the software interface intuitively shows the project test data and curves for easy monitoring.

:: Highly scalable: the system is modularized and can be flexibly matched according to needs

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Capacitance-Voltage (C-V) measurements are widely used to measure semiconductor parameters, especially for MOS CAP and MOSFET structures.The capacitance of a MOS (Metal-Oxide-Semiconductor) structure is a function of the applied voltage, and the curve of the MOS capacitance as a function of the applied voltage is called the C-V curve (referred to as the C-V characteristic), and the C-V curve test is used to conveniently determine the thickness of the silica layer, dox, The C-V curve test can easily determine the thickness of the silica layer, dox, the doping concentration of the substrate, N, the movable charge surface density Q1 in the oxide layer, and the fixed charge surface density Qfc.

 

Software Interface and Functions

1700703796715345

CV test interface

1700703827188198

CV curve diagram

module (in software) VGS Range IGSS/IGE VDS range IDSS/ICES Source Measurement Accuracy
SMU 0 - ±30V (optional) ≥10pA (optional) 0-±300 ≥10pA 0.03%
0-±1200V ≥1nA 0.1%
0-±2200V ≥1nA 0.1%
0-±3500V ≥1nA 0.1%

 

module (in software) Test Frequency Frequency output accuracy Fundamental Accuracy AC test signal alignment DC test signal alignment Output Impedance Measurement range
LCR 10Hz-1MHz ±0.01% ±0.05% 10mV to 2Vrms

(1m Vrms resolution)

10mV to 2V

(1m Vrms resolution)

100Ω |Z|, R, X

0.001mΩ-99.999MΩ

Cs, Cp

0.01pF - 9.9999F

D

0.00001-9.999

DCR

0.001mΩ-9.999MΩ

θ

-180° -+180°

|Y|, G, B

0.1nS-99.999S

Ls Lp

0.1nH-9.999kH

Q

0.1-9999.9

Δ%

-9999%-999%

 

*The above specifications are subject to update without prior notice.

● Wide frequency range: frequency range 10Hz ~ 1MHz continuous frequency point adjustable

● High accuracy and large dynamic range: provide 0V~3500V bias voltage range, accuracy 0.1%

● Built-in CV test: Built-in automated CV test software, including C-V (capacitance-voltage), C-T (capacitance-time), C-F (capacitance-frequency) and other test test functions.

IV-compatible testing: Supports both breakdown and leakage current characterization.

● Real-time curve plotting: the software interface intuitively shows the project test data and curves for easy monitoring.

:: Highly scalable: the system is modularized and can be flexibly matched according to needs

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C-V Characterization System for Semiconductor Power DevicesC-V Characterization System for Semiconductor Power Devices

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